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PRODUCT
: FPA-3000 i5+
This
new high-throughput i-line stepper, with numerical aperture
(NA) of 0.63, is capable of printing less than 0.35um features
at better than 100 WPH, making it an ideal mix-and-match comparison
with Canon's FPA-3000EX5 DUV stepper
FEATURES
- Superior
Optical Performance
- Enhanced
Throughput
- Improved
Alignment Accuracy
- Mix
& Match for High Productivity
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