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PRODUCT
: Reticle
Storage and Tracking Manager
RSM is able
to monitor unlimited numbers of reticles, carriers, stocker
and racks while guaranteeing the same time fastest reticle access
and information tracking.
- Reduce
misproduction by avoiding reticle handling errors.
- Reduce
misproduction caused by damaged and unclean reticles
- Maximize
equipment efficiency
- Enable
systematic reticle management solution for clean room environment.
Product
Features:
- Tracking
of reticle movement, status, usage, inspection results and
repair history for reticle lifecycle.
- Local
and remote location and retrieval of reticles via convenient
wildcard filtering option by reticle Id, barcode, status,
and location.
- Grouping
management of reticles.
- Support
of all combinations of SECS-compliant reticle stockers and
racks.
- Smooth
integration with existing CIM environment in the industry.
- Automation
inspection and cleaning cycles for group or individual reticle.
- Support
barcode reader and label printer peripherals.
- Handheld
device (such as palm) for reticle search and check list
feature
- View
the status of the reticles and stockers remotely with any
internet browser.
- Remote
report and backup generation in a user configurable format.
- Browse
reticle inventory and/or queuing for retrievals via web
browser from any terminal with fab network.
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