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PRODUCT
: Process Chamber Assurance Tool (CAT)
Designed
To Test Pressure Sensors, Mass Flow Controllers, Pump Performance
And Chamber Integrity.
- Performance
monitoring of process tool components to prevent unscheduled
down time and maintenance.
- Fingerprinting
of high yield process tools for system matching with like
tools.
- Bringing
new and down systems online and into specification.
- Baselining
tools before starting a run
FEATURES
- Windows
Software Interface
- Security
- System
Status
- Mechanical
Features
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