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PRODUCT
: PHI 680
Field
Emission
Scanning Auger Nanoprobe™
FEATURES
- New
five-axis fully-motorized stage
- Electron
gun with Schottky thermal field emitter
- New
high-performance, low-energy ion sputter gun
-
Field-proven Cylindrical Mirror Analyzer (CMA)
- MultiChannel
Detector (MCD) with eight channels of parallel detection
- Coaxial
mounting of electron gun and analyzer
- Magnetically-levitated
turbopump for ion gun differential pumping and rapid intro
pumpdown
- Clean,
ultrahigh vacuum environment
- Standardized,
intuitive personal computer hardware, software and networking
- Extensive
worldwide support
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