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| Process
Equipments |
Metrology
& Analytical Equipments |
|
|
|
Wafer
Fab Automation & Peripheral Support
|
Software
& Automation |
• Adtec
• FST
• Hitachi Metals
• Lucas Labs
• Nidek
|
|
|
Consumables
& Spare Parts
|
Support
& Services |
•
Silicon Parts•
Anodized Parts
•
Stainless Steel parts and
bellows
• Quartz parts•
Ceramics parts
•
Aluminium parts
•
O-Rings
•
Matching
unit repair
•
RF
Generator repair
•
Parts
cleaning
•
Polyimide
ESC refirbishment
•
Susceptor
refirbishment
|
• Evans
Analytical Group (EAG) |