| LineWorks
ETM Features |
- Centralized
online monitoring and reporting of the short term
and the long term efficiency of a process equipment
- Configurable
recipe and lot tracking
- Maintenance
and calibration order monitoring with online alarm
- User
definable time and event model to generate company
dependent or SEMI E10-96 and ARAMS compliant reports
- Online
alarming based on ETM alarm conditions
- LineWorks
ETM operation calendar for each process equipment
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PRODUCT
: LineWorks
ETM
LineWorks
ETM offers powerful functions for the automatic online control
of production times and the downtime or uptime of process
and production equipment. ETM performs the complete recording
of all equipment states which can be viewed in various Web
reports online.
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